Isakhiwo Sokuhlanza I-Plasma

Ukwakheka kwesicoci se-plasma siqukethe izingxenye ezintathu eziyinhloko: iyunithi yokulawula, i-vacuum chamber, nephampu yevacuum. Ake sixoxe ngalezi zingxenye ezintathu:
1. Iyunithi yokulawula
Izihlanzi ze-Plasma ezisetshenziswa e-China, okuhlanganisa nezingenisiwe, zinamayunithi okulawula anezinhlobo ezine eziyinhloko: i-semi-okuzenzakalelayo, i-othomathikhi ngokugcwele, i-PC{1}}elawulwayo, nesikrini esithintwayo se-LCD.
Iyunithi yokulawula iphinde ihlukaniswe izingxenye ezimbili eziyinhloko:
1) Ukunikezwa kwamandla: Kukhona amaza okuphakela amandla amathathu amakhulu: 40 kHz, 13.56 MHz, kanye no-2.45 GHz. Ukunikezwa kwamandla okungu-13.56 MHz kudinga i-adaptha yamandla.
2) Iyunithi yokulawula uhlelo: Kunezinhlobo ezintathu: isilawuli senkinobho-(semi{2}}okuzenzakalelayo futhi okuzenzakalelayo ngokugcwele), isilawuli sekhompyutha, nesilawuli se-PLC (isikrini sokuthinta se-LCD).
2. Igumbi leVacuum:
Amakamelo e-vacuum enziwe ngokuyinhloko ngezinto ezimbili:
1) Igumbi le-vacuum yensimbi engagqwali.
2) Igumbi le-quartz.
3. Iphampu yeVacuum:
Amaphampu e-vacuum ahlukaniswe izinhlobo ezimbili:
1) Iphampu eyomile.
2) Iphampu yamafutha.