Izicelo Eziqondile Zokuhlanza I-Plasma

Imishini yokuhlanza i-plasma/etching ikhiqiza i-plasma ngokubeka ama-electrode amabili esitsheni esivaliwe ukuze kwakhiwe insimu kagesi. Iphampu ye-vacuum isetshenziselwa ukugcina izinga elithile le-vacuum. Njengoba igesi iya ngokuya ingavamile, ibanga phakathi kwama-molecule kanye nokunyakaza okukhululekile kwama-molecule noma ama-ion nawo ayanda. Ngaphansi kwethonya lenkundla kagesi, la ma-ion ayashayisana futhi akhe i-plasma. Lawa ma-ion asebenza kakhulu, anamandla anele ukunqamula cishe wonke amabhondi amakhemikhali, okubangela ukusabela kwamakhemikhali kunoma iyiphi indawo eveziwe. Ama-plasma egesi ahlukene anezindawo zamakhemikhali ezihlukene. Isibonelo, i-oxygen plasma i-oxidizing kakhulu, ikwazi ukwenza i-photoresist ikhiqize igesi, ngaleyo ndlela ifinyelele umphumela wokuhlanza. I-Corrosive gas plasma ine-anisotropy enhle kakhulu, ehlangabezana nezidingo ze-etching. Ukwelashwa kwe-Plasma kukhiqiza ukukhanya, yingakho igama lokukhishwa kokukhanya.
Indlela yokuhlanza i-plasma incike kakhulu "ekusebenzeni" kwezinhlayiya ezisebenzayo ku-plasma ukuze zisuse amabala angaphezulu. Ngokuphathelene nendlela yokusabela, ukuhlanzwa kwe-plasma ngokuvamile kuhilela inqubo elandelayo: amagesi angaphili ajabule abe yisimo se-plasma; izinto zegesi zikhangiswa endaweni eqinile; amaqembu e-adsorbed asabela nama-molecule endaweni eqinile ukuze akhe ama-molecule omkhiqizo; ama-molecule omkhiqizo abola abe yisigaba segesi; futhi izinsalela zokusabela ziyasuswa ebusweni.

Isici esibaluleke kakhulu sobuchwepheshe bokuhlanza i-plasma ukuthi ingakwazi ukuphatha noma yiluphi uhlobo lwe-substrate, okuhlanganisa izinsimbi, ama-semiconductors, ama-oxides, nezinto eziningi ze-polymer ezifana ne-polypropylene, i-polyester, i-polyimide, i-polyvinyl chloride, i-epoxy, ngisho ne-polytetrafluoroethylene. Ingakwazi ukuhlanza kokubili indawo yonke kanye nezindawo ezithile, kanye nezakhiwo eziyinkimbinkimbi.