I-IC Substrate Vertical Plasma Equipment

I-IC Substrate Vertical Plasma Equipment yakhelwe ngokukhethekile ukuhlanza ama-substrates e-IC ezinqubweni zokupakisha ze-IC, ikhipha ngempumelelo izinhlayiya, uwoyela, nokungcola okungaphezulu ukuze kuhlinzekwe-izinga eliphezulu lezinyathelo zokupakisha ezilandelayo. Uhlelo lusekela ukusebenza okuzenzakalelayo ngokugcwele ngesikrini sokuthinta kanye nokulawula kwe-PLC, okuvumela ukuphathwa okuphelele kwamapharamitha wenqubo,{2}}ukuqapha kwesikhathi sangempela, ukuphathwa kweresiphi, nezaziso ze-alamu.

Thumela ukuPhenya

Incazelo Yomsebenzi

I-IC Substrate Vertical Plasma Equipment yakhelwe ngokukhethekileukuhlanza ama-substrates e-IC ezinqubweni zokupakisha ze-IC zendabuko, ukususa ngempumelelo izinhlayiya, uwoyela, nezinto ezingcolile ukuze kunikeze{0}}ikhwalithi ephezulu yezinyathelo zokupakisha ezilandelayo. Uhlelo lusekelaukusebenza okuzenzakalelayo ngokugcwelengesikrini sokuthinta kanye nesilawuli se-PLC, esivumela ukuphathwa okuphelele kwamapharamitha wenqubo,{0}}ukuqapha kwesikhathi sangempela, ukuphathwa kweresiphi, nezaziso ze-alamu. Iqinile, ithembekile, futhi kulula ukuyisebenzisa, ihlangabezana{2}}nezimfuneko eziphezulu{3}}nokungaguquguquki okuphezulu kwezinqubo zokupakisha ze-IC.

Izingxenye Eziyinhloko (Ukucushwa)

Vacuum Solenoid Valves

Ikhwalithi ephezulu-SVF brand solenoid valvesqinisekisa ukusabela okusheshayo nokulawula okuzinzile kokugeleza kwegesi ye-vacuum chamber.

Ukushintsha Kwengcindezi kanye Nabalawuli

I-SMC brand high{0}}izishintshi ezinembayo zokucindezela nezilawulihlinzeka ngokulawula okunembile kwe-vacuum nengcindezi yegesi, ukugcina ukusebenza kwenqubo engaguquki.

I-Electrode Design

Ama-electrode enziwe kusuka ku-aipuleti elilodwa le-aluminium eliqinile elinendawo engenalutho, kanye namashaneli okupholisa asetshenziswaizimbobo-ezibhoboziwe ezijulile ezihlanganiswe nama-flow baffles abekwe ngendlela efaneleukuqondisa amanzi apholisayo endleleni echaziwe. Lokhu kuqinisekisa ukushisa okufanayo kwe-electrode, ukuthuthukisa ukungaguquguquki kokwelashwa kwe-plasma nokuphindaphinda.

Izicelo Eziyinhloko

Imishini isetshenziswa kakhuluUkuhlanza i-substrate ye-IC, elawula ngokunembile indawo ezungezile ye-plasma ukuze kukhishwe izinhlayiya ezinhle, inhlaka esele, nezinto ezingcolile eziphilayo. Ithuthukisa isivuno sokupakishwa kwe-IC kanye nokuvumelana komkhiqizo. Uhlelo luhambisana nama-substrates anobukhulu obuhlukahlukene kanye nezinto zokwakha, ezihlangabezana nenhlanzeko eqinile kanye nezidingo zokucubungula ngokunemba zemboni yokupakisha ye-electronics.

Imininingwane Yezobuchwepheshe

I-Vacuum Level

Iyalondoloza20-50 Pangesikhathi sokusebenza okuvamile, ukuqinisekisa indawo yokwelashwa ezinzile ye-plasma.

Indlela Yokugeleza Kwegesi

Isebenzisa aphezulu okunelungelo lobunikazi-i-inlet, idizayini ye-exhaust engezansi{1}}nama-flow baffles ukuze kuqinisekiswe ukugeleza komoya okufanayo ngaphakathi kwegumbi kanye nemiphumela yokwelashwa engaguquki.

Uhlelo Lokupholisa

Amashaneli okupholisa ama-Electrode aklanywe anezimbobo-ezibhoboziwe ezijulile kanye nama-flow baffles ukuze aqondise amanzi endleleni emisiwe, kuqinisekiswe izinga lokushisa elifanayo lama-electrode kanye nokwenza ngcono ukuqina kokwelashwa kwe-plasma nokuphindaphindeka.

Inani Lohlelo

Imishini ye-plasma eqondile ye-IC substrate inikeza aisixazululo esisebenza kahle kakhulu, esizinzile, futhi esihlakaniphile sokuhlanza indawo. Ngokulungiselela ukugeleza komoya kwe-vacuum kanye ne-electrode cooling design, ithuthukisa kakhulu isivuno sokupakishwa kwe-IC kanye nokuvumelana komkhiqizo kuyilapho kunciphisa amaphutha enqubo kanye nemfucuza yokukhiqiza. Uhlelo kulula ukulusebenzisa nokunakekela, lusebenza{2}}lusebenza kahle, futhi luhambisana nemvelo, okulwenza lube yimpahla ebalulekile kubakhiqizi bokupakisha be-IC abafuna ukuthuthukisa ukukhiqiza, ukuqinisekisa ikhwalithi engaguquki, nokugcina ukuqina kwenqubo.

Amashadi ashisayo: Imishini ye-plasma ye-ic substrate mpo, i-China ic substrate mpo abakhiqizi bemishini ye-plasma, imboni